The Elko facility is home to the Film Deposition/Diffusion Systems Division of Pacific Western Systems.  PWS Films group offers a full spectrum of diffusion equipment and services including furnaces capable of processing up to 300mm diameter wafers, a full range of atmospheric, LPCVD and PECVD processing capabilities, highly efficient VAPOX systems, process development capability and "turn-key" systems with worldwide 
installation and process startup ability.

PWS is well established as a worldwide supplier of CVD film equipment with more than 1500 COYOTE systems and 450 ALPHA diffusion tables installed.

Chemical Vapor Deposition System Design
and Manufacturing

285 Spruce Street
Elko, NV. 89801
(775) 738-9851 (Voice)
(775) 738-9404 (FAX)
Copyright 2001 Pacific Western Systems, Inc.
Last Updated: November 4, 2004