P5 FULLY AUTOMATIC PROBING
PWS’ P5 Prober Systems are a family of fully automated production substrate handling systems that deliver high accuracy, high performance and high reliability probing.
All P5 probe systems come standard with a frictionless Air Bearing Motion System (ABMS) for X-Y positioning. The ABMS is a lead-screw driven stage that moves on a friction-free film of air. The stage is supported by air only during movement, and sits on a precision lapped surface at rest. The ABMS is specifically designed for high precision micro stepping of semiconductor wafers and similar substrates. The air bearing motion system, combined with PWS’ in-house manufactured lead screws, ensures superior accuracy, repeatability, and mechanical stability.
P5 systems are also equipped with ProbeCommander, PWS’ Real Time Wafer Mapping software. ProbeCommander, a leading edge NT-based operating environment, significantly simplifies the test and production engineer’s tasks. For example, bin result maps from production tests can be easily re-probed for failures. An engineer can select and move to any tested bin: the moves can be either automatic step-and-repeat or under cursor/mouse control. If needed, unique stepping patterns can be created to step within individual dies.
ProbeCommander includes the following features:
PWS WELCOMES CUSTOM APPLICATIONS AND PROBER CONFIGURATIONS:
* Throughput, stepping or cycle time are not the same as “scanning speed”. Stepping time varies with many factors and is highly dependent upon specific applications. For specific data, please contact PWS engineering.